User manuals for flx f1 and f2 electric bike models. This article is a contribution to the i mprovement of protected silver coatings for reflectors. The front view of the flx 2320 instrument is shown in section 11. Page 20 of element electronics flat panel television flx2610 user guide go. A tencor flx 2320 was used to determine the deflections of polished siwafers 3. View profile view forum posts silver member join date apr 2007 posts 108.
Mechanical characterization of electronbeam resist using. Element schematic diagram service manual circuit diagram wiring schema repair instruction guide user manual free pdf download. For pluggable equipment, the power outlet shall be installed near the equipment. The flx 2320 is a thin film stress instrument that uses a laser scanner to measure the changes in the radius of the curvature of the substrate caused by deposition of a thin. For additional photos and specs, please refer to our website. To endure this period without a decrease of reflectivity, protective coatings with a final layer, which offers a high resistance to. The flexus thin film stress measuring apparatus tfsma measures the changes in the radius of curvature of a substrate create by deposition of a stressed thin film on its surface. Service handbuch schaltungen reparaturanleitung bedienungsanleitungen kostenlos pdf download.
Toho flx2320s wavelength stress measurement cleanroom. Find the user manual you need for your tv and more at manualsonline. On each wafer, the film thickness has a nonuniformity of less than 1%. In this system, curvature was measured by directing a laser at a surface with a known spatial angle. The blue and brown pcb connections must not be altered from factory setting. View and download element flx 3710 user manual online. Flexus 2320 film stress measurement system brumley south inc. We recommend that the manual be located in an accessible location. The flx2320s determines stress by measuring the curvature change of pre and postdeposition of the film. An important point to be brought to the attention of the operator. Spec equipment our products buy refurbished klatencor.
You can find helpful and important information or learn the basics of canon maxify mb2320 with its user manual, user guide and instruction manual. Canon maxify mb2320 windows user manual was written in english and published in pdf file portable document format. View and download element flx 3210 user manual online. Tencor flexus flx 2320 thin film stress system price. Film stress and flexibility with an flx 2320 s at the boston. The user should keep this manual close at hand while becoming familiar with the system. Home capabilities our equipment thin film stress measurement flx 2320 thin film stress measurement flx 2320 show section navigation.
Canon maxify mb2320 manual available online, you can read canon maxify mb2320. An inert flush capability offers a controlled atmosphere in nitrogen or argon, preventing. Writing and editing instructions for use manuals, training manuals, and other documentation accompanying bioprofile products. The toho quickly performs measurements at user selectable orientations and temperatures and can be used for two dimensional stress mapping on wafers ranging from 200 mm diameter down to. This checklist is a brief listing of the major items covered in this manual. Element electronics flat panel television user manual. Mechanical properties and pattern collapse of chemically ampli.
Element electronics flx2610 flat panel television user manual. It takes on big jobs with ease, thanks to a highspeed, 50 sheet adf and two paper cassettes with a combined capacity of 500 sheets, or a full ream. The flexus 2320 equipment standard operating procedure kimberly appel 1. Do not use liquid or spray detergents for cleaning. Thin film stress measurement flx 2320 tofsims imaging spectrometer iontof gmbh tystar doped anneal. The mechanical properties of positive tone chemically amplified resists uv6 and apexe are measured and used in finite element analysis fea to determine the mechanical compliance of photoresist lines as an indicator of the propensity for pattern collapse. The cmi is a complex of clean rooms and processing equipment for the training and scientific experimentation devoted to the users of microtechnologies. These can quickly and easily be switched between their two functions channels and playbacks by using the fader funct. Element electronics flat panel television flx 3210. Mechanical properties and pattern collapse of chemically. This difference in curvature is used to calculate stress by way of stoneys equation, which relates the biaxial modulus of the substrate, thickness of the film and substrate, and the radius of curvatures of pre and postprocess. Thinfilm stress measurement instrument that measures the changes in the radius of curvature of a wafer caused by the deposition of a stressed thin film. Flx flexus thin film stress measurement systems toho.
User manual is located at the stress machine station. The flx 2320 s is a thinfilm stress measurement instrument. Rigsync removes the need to understand dmx if your fixtures support rdm. Film stress that occurs during coating processes leads to voids and cracking and thus constitutes one of the main causes for the failure of electronic parts. Flx flexus thin film stress measurement systems toho technology. A quantitative case study of such changes has been. Introduction the flex operating system is a very versatile and flexible operating system. Tencor flexus flx 2320 thinfilm stress measurement system. The toho technology flx2320 stress measurement tool uses a laser interferometer to measure the curvature of a wafer before and after film deposition. Refer to the glossary at the back of this manual for tifinitions of terms usd throughout. A laser scanner is used to measure the changes in the radius of curvature of the substrate caused by the deposition of a thin film on the wafer. Christine newbold technical field applications scientist. Tv and television manuals and free pdf instructions. Element flx3210 user manual pdf download manualslib.
June 17th, 20 epflcmiphl page 1 sur 3 epfl cmi flx 2320 s warning only the cmi staff is qualified to do a service or to do maintenance user manual 1. Description multisample, medium resolution inspection sem features. The structural relaxation of plasmaenhanced chemicalvapordeposited pecvd silanebased silicon oxide films during thermal cycling and annealing has been studied using wafer curvature measurements. For ground and spacedbased applications, agcoated reflectors are indispensable because of their high reflectivity. Canon maxify mb2320 windows user manual manual device. Klatencor sp1 classic with single 200mm open cassette or single 300mm foup manufacturer. Zero 88 flx s lighting console user manual page 5 of 47 rigsync when flx s is first plugged into a lighting rig, rigsync will set it up automatically and continue working in the background to ensure flx s and your rig are always synchronised and problem free. Important operating and safety instructions save these instructions a before using the battery charger, read all the instructions in addition to the. Servo drives max plus flx 230 digital servo drive from. Tencor flexus flx2320 thinfilm stress measurement system. The flx2320 is a thin film stress instrument that uses a laser scanner to measure the changes in the radius of the curvature of the substrate caused by deposition of a thin film on a wafer. Element schematic diagram service manual circuit diagram. It calculates film stress by measuring the change in radius of curvature of a substrate caused by the deposition of a thin film on the substrate.
Instrument accurately measures changes in the radius of curvature of substrates caused by deposition of stressed thin films on those substrates. For duv lithography process steps with the asml pas 5500350c stepper, cmi recommends to use wafers with the lowest possible total thickness variation ttv flx 2320 was used to determine the deflections of polished siwafers 3. Logon on the access control system on the zone computer to unlock the keyboard of the flx 2320 s 2. Taking the layer geometry, the wafer geometry, the intrinsic material properties of the substrate and the change of deflection into account, the stress of the coated layers can be determined by applying the stoney equation 28. Reliably efficient, the maxify mb2320 printer is engineered for superb efficiency and productivity. Always completely disconnect the power cord from your chassis whenever you work with the hardware. The flexus 2320 equipment standard operating procedure. The flexuss thin film measurement systems from toho technology allow stress measurements in the temperature range 65 c up to 500 c. Standard operating procedures sops micronano technology. These measurements, which determine stress in the amorphous silicon oxide films, are sensitive to both plastic deformation and density changes. Free element electronics flat panel television user manuals. The flexus can also measure elastic constant and thermal expansion coefficient.
The flx2320s is a thinfilm stress measurement instrument. Flexus 2320 stress gage, stresstest stanford nanofabrication facility. Only the cmi staff is qualified to do a service or to do maintenance. Characterization and metrology cleanroom research laboratory. Tencor flx2320 thin film stress measurement jenesis.
Folks i am trying to find a john deere 2420 manual. Scanning electron microscope zeiss evo ma10 nanofab. For normal stress measurement, the hot plate cover and thumbscrews are not used. Suss mask aligner ma6ma8 user manual for suss mask aligner ma6ma8 bottom side alignment using suss mask aligner ma6ma6 photoresist development and stripping liftoff procedure adhesion promotion creating pdms molds with su8 photoresist we recommend to use su8 spin calculator vacuum ovens. Toho technology flx 2320 s toho technology flx 2320 s. Contact tool owner through the helpdesk system for training before running heated. Page 20 of element electronics flat panel television flx 2610 user guide.
The flx 2320 chuck can be suppled with room temp chuck or with optional hot chuck for stress monitoring at high temperature temperatures, and an optional cooling unit that allow a thorough understanding of film properties at temperatures from up to 500c. It then compares the two measured curvatures to calculate the stress on the deposited film. If service is required, the manual should be readily available to aid in the troubleshooting process. My search did not turn up any links john deere ag new equipment. Using the manual or the automated rotation option only available for the flexusr version, the. The purpose of this user s guide is to provide the user of the flex operating system with the information required to make effective use of the available system commands and utilities. Photograph of the toho technology flx 2320 stress measurement tool. Document information um10237 lpc24xx user manual rev. The transport, assembly, and storage of these reflectors take places over a long period before they are finally commissioned for application. A situation which could be potentially hazardous and could result in minor or moderate injury. Element electronics flat panel television flx 2610. You dont have to wait for your prints, thanks a quick printout time and fast multipage copying.
The flx stress measurement system helps troubleshoot applications listed below. Scf series installation and operation manual phone. The systems programmer will be delighted with the wide variety of disk. It provides the user with a powerful set of system commands to control all disk operations directly from the users terminal. The flx2320 film stress measurement system provides accurate.
This is accomplished by first measuring the wafer curvature before the film is deposited and then remeasuring the curvature after the film is deposited. An initial measurement reference, with no film, is required to calculate the deflection resulting from the thin film deposit. The toho quickly performs measurements at user selectable orientations and temperatures and can be used. In this effort the residual strain in exposed negative tone sal 605 and unexposed positive tone apexe resists was characterized for a variety of processing conditions using surface micromachined bentbeam strain sensors fabricated with resist as the structural material.
Tencor flx 2320 thin film stress measurementtencor flx2320kla tencor jenesis metrology. The procedure for creating the 3d deflection map can be found in the user manual section. It used to be available on line from deere to look at but not any more. Abut this manual ttis manual is a stepbystepguide that will acquaint youwith the systemnsfeatures and benefik, it defines the components and their functions, describes their operation, and acquaink you with normal and emergency procedures. Laser scanning to measure stress on all reflecting films. Fisher ca2320 manual stereo integrated amplifier hifi. View and download element flx2210 user manual online.
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